網址:http://ieeexplore.ieee.org/abstract/document/8256190/
題目:Big data analytic for multivariate fault detection
and classification in semiconductor manufacturing
作者:Ying-Jen Chen,Bo-Cheng Wang,Jei-Zheng Wu,Yi-Chia Wu,Chen-Fu Chien
請mail至:[email protected]
將提供微薄的100p (第一位) 感謝